Load Port Module: The Essential Link Between Wafer Transport System...

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2024-05-02 10:13:55 - Перевод -

Load Port Module: The Essential Link Between Wafer Transport System and Process Tool

A Load Port Module serves as the interface between a wafer transport system and a semiconductor process tool such as an etcher or deposition system. It facilitates the safe and ultra-clean transfer of wafers from cassettes stored in the transport system into the vacuum environment of the process chamber for semiconductor fabrication steps. Let's take a closer look at the key components and...

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