Load Port Module: The Essential Link Between Wafer Transport System...

ein Foto hinzugefügt Other

2024-05-02 10:13:55 - Translate -

Load Port Module: The Essential Link Between Wafer Transport System and Process Tool

A Load Port Module serves as the interface between a wafer transport system and a semiconductor process tool such as an etcher or deposition system. It facilitates the safe and ultra-clean transfer of wafers from cassettes stored in the transport system into the vacuum environment of the process chamber for semiconductor fabrication steps. Let's take a closer look at the key components and...

0 Kommentare 0 Anteile 723 Ansichten 0 Vorschau